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ATS Engineering Co., Ltd.
 
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ATS Engineering Co., Ltd.
[Korea]
Address:
Rm.701,333-7 B-Dong,Keumkangpenteriom IT Tower,Sangdaewon-Dong, Jungwon-Gu,Seongnam-City, Gyeonggi-do 462-120 Korea
Phone:
82-31-7300644
Contact name:
Choi, Ji-Woon , Staff
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ATS Engineering Co., Ltd.
 
Products

Page Door Valve
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Page Door Valve
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 Model Number MG-PV-H-2000/120-ST

Two types of MTAPS Valve are now available. The PV Series is directly installed in the process chamber whereas the LV Series is directly mounted in the load lock chamber. The PV Series was mass produced for the first time in Korea more than two years ago and has been recognized as a trouble-free product ever since.

Application Field

  • LCD-Sputter, Dry Etcher, CVD, Plasma Asher
  • OLED
  • Solarcell
  • ETC, Vaccum System

Features

  • Standard ATM-VAC Sealed Valve
  • Particle Free
  • Easy Maintenance
  • Pneumatic Actuator with Position Sensor

Specifications

Leak rate(25°C)
<1x10(-8)mbarL/s, 30S, He/air
Air quality
Filtered(5μm), unoiled air 3~6bar
Differential pressure on the gate
<5 mbar
Cycles until first service
>1.5year(unheated and vacuum, Cleanroom)
Opening/Closing time
>5sec(7th over)>3.5sec(4th~6th)
Operating temperature
-Seal plate
-Actuator
-Pneumatic control unit

<120°C
<40°C
<50°C
Seal Materials
Viton, Customer Option
Body Materials
AL6061/SUS304
Application
Gen4th~8th

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