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ATS Engineering Co., Ltd.
 
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ATS Engineering Co., Ltd.
[Korea]
Address:
Rm.701,333-7 B-Dong,Keumkangpenteriom IT Tower,Sangdaewon-Dong, Jungwon-Gu,Seongnam-City, Gyeonggi-do 462-120 Korea
Phone:
82-31-7300644
Contact name:
Choi, Ji-Woon , Staff
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ATS Engineering Co., Ltd.
 
Products

Page Door Valve
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Page Door Valve
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 Model Number MG-PV-H-1250/170-ST

The MGAPS PV Series is a new concept of system valve that incorporates for the first time in the world a countermeasure for back pressure to resolve the problem of reverse direction back pressure. At present, domestic and international patents are pending, and the series is our main line of ATS valves. Unlike competitive products which use high pressure to deal with back pressure, the MGAPS PV Series counters back pressure with a low-pressure air supply, thereby minimizing the stress on the components and extending their lives.

Application Field

  • LCD-Sputter, Dry Etcher, CVD, Plasma Asher
  • OLED
  • Solarcell
  • ETC, Vaccum System

Features

  • Standard ATM-VAC Sealed Valve
  • Particle Free
  • Easy Maintenance
  • Pneumatic Actuator with Position Sensor

Specifications

Leak rate(25°C)
<1x10(-8)mbarL/s, 30S, He/air
Air quality
Filtered(5μm), unoiled air 3~6bar
Differential pressure on the gate
<5 mbar
Cycles until first service
>1.5year(unheated and vacuum, Cleanroom)
Opening/Closing time
>5sec(7th over)>3.5sec(4th~6th)
Operating temperature
-Seal plate
-Actuator
-Pneumatic control unit

<120°C
<40°C
<50°C
Seal Materials
Viton, Customer Option
Body Materials
AL6061/SUS304
Application
Gen4th~8th

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