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ATS Engineering Co., Ltd.
 
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ATS Engineering Co., Ltd.
[Korea]
Address:
Rm.701,333-7 B-Dong,Keumkangpenteriom IT Tower,Sangdaewon-Dong, Jungwon-Gu,Seongnam-City, Gyeonggi-do 462-120 Korea
Phone:
82-31-7300644
Contact name:
Choi, Ji-Woon , Staff
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ATS Engineering Co., Ltd.
 
Products

Page TM Valve[Insert Type Valve]
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Page TM Valve[Insert Type Valve]
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 Model Number MT-TV-N-2000/120-ST

The TV Series is mounted on the transfer module and comes in two types : the MTAPS Series, which uses a membrane tube, and the MGAPS Series, which is fitted with a gear module.

Application Field

  • LCD-Sputter, Dry Etcher, CVD, Plasma Asher
  • OLED
  • Solarcell
  • ETC, Vaccum System

Features

  • Standard ATM-VAC Sealed Valve
  • Particle Free
  • Easy Maintenance
  • Pneumatic Actuator with Position Sensor

Specifications

Leak rate(25°C)
<1x10(-8)mbarL/s, 30S, He/air
Air quality
Filtered(5μm), unoiled air 3~6bar
Differential pressure on the gate
<5 mbar
Cycles until first service
>1.5year(unheated and vacuum, Cleanroom)
Opening/Closing time
>5sec(7th over)>3.5sec(4th~6th)
Operating temperature
-Seal plate
-Actuator
-Pneumatic control unit

<120°C
<40°C
<50°C
Seal Materials
Viton, Customer Option
Body Materials
AL6061/SUS304
Application
Gen4th~8th

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